Fabrication and Electrical Characterization of ISFET for H2O2 sensing

Autor: Pedro H. Duarte, Ricardo C. Rangel, Daniel A. Ramos, Leonardo S. Yojo, Carlos A.B. Mori, Katia R. A. Sasaki, Paula G. D. Agopian, Joao A. Martino
Rok vydání: 2022
Zdroj: 2022 36th Symposium on Microelectronics Technology (SBMICRO).
DOI: 10.1109/sbmicro55822.2022.9881031
Databáze: OpenAIRE