Conduction anisotropy in porous thin films with chevron microstructures
| Autor: | M. J. Brett, D. Vick |
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| Rok vydání: | 2006 |
| Předmět: | |
| Zdroj: | Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films. 24:156-164 |
| ISSN: | 1520-8559 0734-2101 |
| Popis: | Electrical conductivity measurements were performed on structurally anisotropic thin films deposited using the glancing angle deposition apparatus [K. Robbie and M. J. Brett, J. Vac. Sci. Technol. A 15, 1460 (1997); K. Robbie, J. Sit, and M. J. Brett, J. Vac. Sci. Technol. B 16, 1115 (1998); K. Robbie and M. J. Brett, US Patent No. 5,866,204 (2 February 1999)]. The films were comprised of bilayers of titanium over silica, engineered as a chevron morphology. Samples were evaporated at various incident vapor deposition angles α, in order to investigate the effects of morphology and voiding on the behavior of conductivity. A rapid decline in the conductivity, accompanied by an increase in conduction anisotropy in the plane of the substrate, was observed with increasing α. A random walk model was developed to model the transport properties of the films, and applied to microstructures predicted by a three-dimensional ballistic thin film simulator. In order to generate reasonable agreement between the modeling ... |
| Databáze: | OpenAIRE |
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