Analysis and optimization of vertically oriented, through-wafer, laminated magnetic cores in silicon
| Autor: | I. Zana, Mark G. Allen, David P. Arnold |
|---|---|
| Rok vydání: | 2005 |
| Předmět: |
Engineering
Fabrication Silicon business.industry Mechanical Engineering Electrical engineering Mechanical engineering chemistry.chemical_element Mathematics::Geometric Topology Computer Science::Other Electronic Optical and Magnetic Materials law.invention Generator (circuit theory) Lamination (geology) chemistry Mechanics of Materials law Fabrication methods Eddy current Wafer Permanent magnet motor Electrical and Electronic Engineering business |
| Zdroj: | Journal of Micromechanics and Microengineering. 15:971-977 |
| ISSN: | 1361-6439 0960-1317 |
| DOI: | 10.1088/0960-1317/15/5/011 |
| Popis: | This paper compares two fabrication methods for achieving through-wafer, laminated magnetic cores in silicon, intended for microfabricated magnetic devices where vertically oriented (normal to the wafer) magnetic laminations are required to reduce eddy current losses. Given certain fabrication constraints for each method, a theoretical framework is presented to permit the design of the optimal lamination scheme for a particular application. As an example, the analysis is applied to the optimization of laminations for a miniaturized synchronous permanent magnet motor/generator. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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