Increased Stability of Subsurface C Induced by Ca on the C-Incorporated Si(001)-4°-off Substrate

Autor: Hidong Kim, Jae M. Seo, Bolortsetseg Tuvdendorj, Nyamaa Tsogtbaatar, Altaibaatar Lkhagvasuren
Rok vydání: 2020
Předmět:
Zdroj: Journal of the Korean Physical Society. 76:991-1000
ISSN: 1976-8524
0374-4884
DOI: 10.3938/jkps.76.991
Popis: The effects of Ca atoms adsorbed on the C-incorporated Si(001)-4°-off substrate have been investigated by using scanning tunneling microscopy (STM) and synchrotron photoemission spectroscopy (PES). The C atoms incorporated into the subsurface by C2H2 exposure and postannealing at 630 °C induce the c(4 × 4) structure and debunch the double-layer DB steps. The Ca atoms additionally adsorbed on this C-incorporated substrate induce terraces with a width twice that of the clean surface. Until postannealing up to 680 °C, no SiC trace is detected. The SiC islands start to be detected after postannealing at 780 °C, which is about 100 °C higher than that for the identical surface without Ca atoms. After the adsorbed Ca atoms are mostly desorbed by 880 °C postannealing, the SiC islands only remain on the surface. Such a result implies that the adsorbed Ca atoms act as a stabilizer to the subsurface C atoms and increase the onset temperature of SiC formation by 100 °C.
Databáze: OpenAIRE