Testing of MEMS material properties and stability

Autor:	C. Muhlstein, C. Abnet, C. Chui, S.B. Brown
Rok vydání:	2002
Předmět:	Microelectromechanical systems Materials science Fabrication Silicon business.industry chemistry.chemical_element Structural engineering Paris' law Microstructure Stability (probability) Engineering physics chemistry Crack initiation business Material properties
Zdroj:	1998 IEEE AUTOTESTCON Proceedings. IEEE Systems Readiness Technology Conference. Test Technology for the 21st Century (Cat. No.98CH36179).
DOI:	10.1109/autest.1998.713437
Popis:	This article presents progress in characterizing MEMS failure. The results are applicable to a wide range of materials and applications. Data is presented, however, for MEMS polysilicon and single crystal silicon. The observations of fatigue crack growth in single crystal silicon and time dependent crack initiation in polysilicon are important because they indicate MEMS failure modes that have not been previously recognized. The effects of microstructure, environment, and fabrication can become significant on the micro scale even when they are irrelevant in larger, macroscale structures. The microstructure of MEMS devices is also different from that of large bodies of the same material.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::988ca145693635eca48e80a0d8c5982b https://doi.org/10.1109/autest.1998.713437 Zobrazit plný text záznamu