Fully automated real-time recipe verification : SM: Smart Manufacturing, APC: Advanced Process Control
| Autor: | Marcel Stehli, Robert Barlovic |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
021103 operations research
Job shop scheduling Computer science business.industry Recipe 0211 other engineering and technologies 0102 computer and information sciences 02 engineering and technology 01 natural sciences Automation Manufacturing engineering Data modeling Task (project management) 010201 computation theory & mathematics Process control Performance indicator business Advanced process control |
| Zdroj: | 2021 32nd Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC). |
| DOI: | 10.1109/asmc51741.2021.9435737 |
| Popis: | The verification of a new or changed recipe is a common process control task in a semiconductor factory. It is also a prime example of the demanding integration challenges that Advanced Process Control (APC) is facing today. State-of-the-art process control solutions must be fully integrated with the work-in-progress (WIP) fabrication control solutions to enable full automation and to find the optimal tradeoff between competing Fab Key Performance Indicators (KPIs). The recipe verification presented in this paper illustrates a holistic strategy that brings these areas together. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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