The influence of synthesis temperature on structure properties of SrTiO3 ferroelectric films
| Autor: | O. Buslov, A. I. Ivanov, M. M. Gaidukov, V. Loginov, A. B. Kozyrev, A. V. Tumarkin, M. V. Sysa |
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| Rok vydání: | 2001 |
| Předmět: |
Materials science
business.industry Sputter deposition Condensed Matter Physics Ferroelectricity Electronic Optical and Magnetic Materials law.invention Capacitor Planar Control and Systems Engineering law Materials Chemistry Ceramics and Composites Optoelectronics Electrical and Electronic Engineering business |
| Zdroj: | Integrated Ferroelectrics. 39:375-381 |
| ISSN: | 1607-8489 1058-4587 |
| Popis: | The results of structure investigations of SrTiO3 films depending on synthesis temperature are presented and electrical characteristics of 4-electrode planar capacitors based on prepared films are investigated. Finally, the technological conditions of high structure quality SrTiO3 films preparation are determined. SrTiO3 films prepared under these conditions possess electrical characteristics sufficient for room temperature MW applications in a wide frequency range., Keywords: RF magnetron sputtering, SrTiO3 |
| Databáze: | OpenAIRE |
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