Fabrication and RF characterization of zinc oxide based Film Bulk Acoustic Resonator
| Autor: | Dharmendar Boolchandani, Deepak Bansal, Kamaljit Rangra, Raju Patel, Vimal Kumar Agrawal |
|---|---|
| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Materials science Fabrication business.industry chemistry.chemical_element 02 engineering and technology Sputter deposition 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Piezoelectricity Resonator chemistry Aluminium 0103 physical sciences Electrode Return loss Optoelectronics General Materials Science Electrical and Electronic Engineering Center frequency 0210 nano-technology business |
| Zdroj: | Superlattices and Microstructures. 118:104-115 |
| ISSN: | 0749-6036 |
| DOI: | 10.1016/j.spmi.2018.04.001 |
| Popis: | This work reports fabrication and characterization of Film Bulk Acoustic Resonator (FBAR) to improve the performance characteristics for RF filter and sensing application. Zinc oxide as a piezoelectric (PZE) material was deposited on an aluminum bottom electrode using an RF magnetron sputtering, at room temperature, and gold as top electrode for the resonator. Tetramethyl ammonium hydroxide (TMAH) setup was used for bulk silicon etching to make back side cavity to confine the acoustic signals. The transmission characteristics show that the FBARs have a central frequency at 1.77 GHz with a return loss of −10.7 dB. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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