Soft Magnetic Properties of Fe/Fe-N Multilayered Films by Sputtering and ECR Plasma Nitridation

Autor:	Hideaki Ono, Miyagawa Tsugio, Masashi Fujinaga, Yonemoto Takaharu
Rok vydání:	1992
Předmět:	Plasma nitridation Materials science Mechanics of Materials Sputtering Materials Chemistry Metals and Alloys Analytical chemistry Condensed Matter Physics
Zdroj:	Journal of the Japan Institute of Metals. 56:600-603
ISSN:	1880-6880 0021-4876
DOI:	10.2320/jinstmet1952.56.5_600
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::97d8e37d277b3eb3fcce9c4ae0ae2892 https://doi.org/10.2320/jinstmet1952.56.5_600 Zobrazit plný text záznamu