Thermochemical etching effect on CVD diamond film in an oxygen atmosphere
| Autor: | Keizo Uematsu, Nozomu Uchida, Katsuichi Saito, Tsutomu Kurita |
|---|---|
| Rok vydání: | 1990 |
| Předmět: |
Materials science
Scanning electron microscope business.industry Diamond chemistry.chemical_element Chemical vapor deposition engineering.material Oxygen Atmosphere symbols.namesake Optics chemistry Chemical engineering Etching (microfabrication) X-ray crystallography engineering symbols General Materials Science business Raman spectroscopy |
| Zdroj: | Journal of Materials Science Letters. 9:249-250 |
| ISSN: | 1573-4811 0261-8028 |
| DOI: | 10.1007/bf00725813 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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