Microstructural Evolution of Cu Thin Film on the Nano-Thin TaNx/Oxygen Stuffed TaNx Structure
| Autor: | Minwoo Nam, Eunmi Choi, Areum Kim, Sang June Hahn, Keunwon Kang, Longshou Zheng, Soon Hyeong Kwon, Soo-Kil Kim, Ju Young Yun, Sung Gyu Pyo |
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| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Microstructural evolution Materials science Metallurgy Biomedical Engineering chemistry.chemical_element Bioengineering 02 engineering and technology General Chemistry 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Oxygen chemistry 0103 physical sciences Nano General Materials Science Thin film 0210 nano-technology |
| Zdroj: | Journal of Nanoscience and Nanotechnology. 16:11018-11021 |
| ISSN: | 1533-4899 1533-4880 |
| DOI: | 10.1166/jnn.2016.13282 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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