Microwave resonators from YBa2Cu3O7−δthin films made by plasma‐enhanced metalorganic chemical vapor deposition

Autor:	Yimei Li, G.V. Negrete, Jie Zhao, P. E. Norris, C. S. Chern, K.H. Young, McD. Robinson
Rok vydání:	1992
Předmět:	Laser ablation Materials science Physics and Astronomy (miscellaneous) business.industry Mineralogy Substrate (electronics) Chemical vapor deposition Epitaxy Resonator Surface conductivity Optoelectronics Thin film business Microwave cavity
Zdroj:	Applied Physics Letters. 61:543-545
ISSN:	1077-3118 0003-6951
DOI:	10.1063/1.107856
Popis:	Epitaxial YBa2Cu3O7−δ thin films on LaAlO3 deposited by plasma‐enhanced metalorganic chemical vapor deposition were tested in a 100 GHz microwave cavity and as patterned 5.6 GHz resonators. Two films, both having high critical temperature (≳90 K) and high critical current density (≳106 A/cm2), exhibited low‐power Q’s of 5400 and 8000 as 5.6 GHz microstrip resonators when operated at 77 K. The equivalent surface resistances at 10 GHz are 1.7 and 1 mΩ, respectively. Despite the fact that these films are thinner than typical laser ablation films, the results are within a factor of 2 of the best laser ablation prepared YBa2Cu3O7−δ films.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::972d304209057a51bfa0adc65e308310 https://doi.org/10.1063/1.107856 Zobrazit plný text záznamu