Extension of Stacking Faults in 4H-SiC pn Diodes under a High Current Pulse Stress

Autor: Masaki Miyazato, Hirokazu Fujiwara, Hajime Okumura, Tomohisa Kato, Yoshiyuki Yonezawa, Masaaki Miyajima, Kimimori Hamada, Akihiro Otsuki, Yohei Iwahashi
Rok vydání: 2017
Předmět:
Zdroj: Materials Science Forum. 897:218-221
ISSN: 1662-9752
Popis: We investigated the expansion of stacking faults (SFs) under a high current pulse stress in detail. In situ observations showed bar-shaped SFs and two types of triangle SFs with different nucleation sites. The calculated partial dislocation velocity of the bar-shaped SFs was four times faster than that of the triangle SFs. The temperature dependence of the partial dislocation velocity was used to estimate activation energies of 0.23±0.02 eV for bar-shaped SFs and 0.27±0.05 eV for triangle SFs. We also compared the electrical characteristics before and after the stress. The forward voltage drop slightly increased by 0.05 V, and the leakage current did not increase.
Databáze: OpenAIRE