A Modular Three-Dimensional Hall Effect Sensor for Performance Optimization

Autor:	Eng Huat Toh, Tam Lyn Tan, Jian-Yi Wong, Patrick Cao, Praveen Arikath, Mohd Nurul Islam, Ping Zheng, Yongshun Sun, Mathew Shajan, Elgin Quek, R.K. Jain
Rok vydání:	2022
Předmět:	Physics Adder business.industry Doping Electrical engineering Modular design Magnetic sensing Magnetic field Planar Hall effect sensor Sensitivity (control systems) Electrical and Electronic Engineering business Instrumentation
Zdroj:	IEEE Sensors Journal. 22:11256-11263
ISSN:	2379-9153 1530-437X
Popis:	This paper presents three dimensional (3-D) Hall sensors that are capable of detecting magnetic fields in three axis directions and are realized on 180BCDLite® technology with one or two mask adders. The 3-D Hall sensor architecture adopts a modular approach that enables optimization of the planar and vertical Hall devices. The geometries and doping profiles of the Hall devices can be designed for various performance specifications. The planar Hall devices are engineered independently to achieve either a high current–related sensitivity SI >385 V/(A.T) or a high voltage–related sensitivity SV >50 mV/(V.T). For the vertical Hall devices, SV up to 50 mV/(V.T) are demonstrated. The modular design enables flexibility for designers to provide a System-on-Chip (SoC) to meet the needs for a variety of magnetic sensing applications at a low-cost.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::96e5cec1dff4583202365f75cb3175c2 https://doi.org/10.1109/jsen.2021.3090211 Zobrazit plný text záznamu