Highly Sensitive Structure of Nanomechanical Gas Sensor Based on Stress Concentration Generated by Cantilever Lateral Deflection
| Autor: | Masaya Toda, Takahito Ono, Mai Yamazaki, Krzysztof Moorthi, Takumi Hokama, Zhuqing Wang |
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| Rok vydání: | 2019 |
| Předmět: |
chemistry.chemical_classification
Cantilever Materials science Humidity Stiffness 02 engineering and technology Polymer 021001 nanoscience & nanotechnology 01 natural sciences Piezoresistive effect 010406 physical chemistry 0104 chemical sciences Stress (mechanics) chemistry medicine medicine.symptom Composite material 0210 nano-technology Absorption (electromagnetic radiation) Stress concentration |
| Zdroj: | 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII). |
| DOI: | 10.1109/transducers.2019.8808616 |
| Popis: | This paper reports a nanomechanical gas sensor using stress concentration at a piezoresistor. The sensor consist of a functional polymer embedded into Si comb and a Si cantilever with the piezoresistor at the support. The composite membrane generates a stress depending on absorption of gas species. The stress is converted via the lateral deflection of the cantilever to the enhanced strain of the piezoresistor at the support part of the cantilever. The difference in the stiffness of the cantilever and the piezoresistive part induces a stress concentration. The proposed design gives approximately 20 times higher sensitivity than other conventional sensors, and ΔR/R of the final design for 1%RH humidity change is estimated to be ΔR/R = 2.34×10-3. The sensitivity to humidity of the fabricated sensor is 3.92×10-5 /%RH and this sensor can distinguish acetone and ethanol. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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