Elimination of defects in plasma polymerized films used in laser fusion targets

Autor:	S.A. Letts, L. E. Lorensen, J.D. Illige, C.W. Hatcher, W.L. Johnson, D.W. Myers
Rok vydání:	1979
Předmět:	chemistry.chemical_compound Surface coating Materials science Monomer Chemical engineering chemistry Polymerization Analytical chemistry Plasma diagnostics Plasma Fluorocarbon Inertial confinement fusion Deposition (law)
DOI:	10.2172/5862868
Popis:	This study was conducted to understand and control the parameters governing the formation of defects in plasma polymerized surfaces. An inductively-coupled discharge was used as the source of activated monomer. Four types of well characterized surface irregularities were produced on glass slides which were subsequently fluorocarbon coated. Optimization of the process variables is discussed. (MOW)
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::96be0da1841fc1822c66eed74b60bea2 https://doi.org/10.2172/5862868 Zobrazit plný text záznamu