Surface topography measuring system based on wavelength switching and phase shift scanning

Autor:	何浪 He Lang, 何涛 He Tao, 王选择 Wang Xuanze, 杨练根 Yang Lian-gen, 刘文超 Liu Wen-chao
Rok vydání:	2015
Předmět:	Surface (mathematics) Wavelength Optics Materials science business.industry business Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics and Precision Engineering. 23:2466-2472
ISSN:	1004-924X
DOI:	10.3788/ope.20152309.2466
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::96b47386621d6b5a15bf49d2365c2d6b https://doi.org/10.3788/ope.20152309.2466 Zobrazit plný text záznamu