Post-polymerization modification of PS-b-PMMA for achieving directed self-assembly with sub-10nm feature size

Autor:	Takuya Isono, Ken Miyagi, Hiroaki Mamiya, Akiyoshi Yamazaki, Toshifumi Satoh, Kohei Yoshida
Rok vydání:	2019
Předmět:	Directed self assembly Materials science Feature (computer vision) Nanotechnology Post polymerization
Zdroj:	Advances in Patterning Materials and Processes XXXVI.
DOI:	10.1117/12.2515933
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9673232672551f03b9c48f9a4b212311 https://doi.org/10.1117/12.2515933 Zobrazit plný text záznamu