Excimer Laser Micromachining of LiNbO3 for Optical and Microwave Applications

Autor:	Ebrahim Mortazy, Ke Wu, Michel Meunier
Rok vydání:	2009
Předmět:	X-ray laser Surface micromachining Materials science Excimer laser business.industry medicine.medical_treatment medicine Optoelectronics Electrical and Electronic Engineering business Instrumentation Industrial and Manufacturing Engineering Microwave applications
Zdroj:	Journal of Laser Micro/Nanoengineering. 4:79-83
ISSN:	1880-0688
DOI:	10.2961/jlmn.2009.02.0001
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::966a4a240a9d6824b2341e9606a1a37e https://doi.org/10.2961/jlmn.2009.02.0001 Zobrazit plný text záznamu