Sustainable semiconductor manufacturing: lessons for lithography and etch

Autor:	Emily E. Gallagher, Philippe Bezard, Lizzie Boakes, Andrea Firrincieli, Cedric Rolin, Lars-Ake Ragnarsson
Rok vydání:	2023
Zdroj:	Advanced Etch Technology and Process Integration for Nanopatterning XII.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9637cae57bc35c26bb56f912ae5e801a https://doi.org/10.1117/12.2662857 Zobrazit plný text záznamu