A MOCVD reactor safety system for a production environment

Autor:	Raymond K. Tsui, Jay Curless, Neal J. Mellen, Eric S. Johnson, D. Convey
Rok vydání:	1984
Předmět:	Waste management Fire detection Shutdown Condensed Matter Physics Overpressure Inorganic Chemistry chemistry.chemical_compound Arsine chemistry Hazardous waste Materials Chemistry Environmental science Research reactor Metalorganic vapour phase epitaxy Trimethylgallium
Zdroj:	Journal of Crystal Growth. 68:497-501
ISSN:	0022-0248
DOI:	10.1016/0022-0248(84)90456-1
Popis:	MOCVD growth of GaAs frequently is accomplished using trimethylgallium and arsine. Although these materials are presently used safely worldwide in a research environment, their hazardous nature is an important consideration in the application of MOCVD to production. This paper describes a MOCVD reactor safety-interlock and automatic shutdown system now being evaluated on a research reactor for its suitability in a production environment. Some specific features employed are fire detection, reactor overpressure prevention, and toxic gas exposure control. This paper will also discuss the technique used to remove As and AsH 3 from the reactor exhaust.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::960add8c619e3b23c13ebb884c772149 https://doi.org/10.1016/0022-0248(84)90456-1 Zobrazit plný text záznamu