Direct deposition of SrBi2Ta2O9 Film on IrO2 electrode using liquid source CVD method
| Autor: | Shinji Miyagaki, Hideki Yamawaki, Yoshihiro Arimoto, Takashi Eshita |
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| Rok vydání: | 1999 |
| Předmět: |
Diffraction
Materials science business.industry Condensed Matter Physics Electronic Optical and Magnetic Materials Control and Systems Engineering Electrode Materials Chemistry Ceramics and Composites Optoelectronics Electric properties Deposition (phase transition) Electrical and Electronic Engineering Thin film business |
| Zdroj: | Integrated Ferroelectrics. 26:103-108 |
| ISSN: | 1607-8489 1058-4587 |
| Popis: | SrBi2Ta2O9 (SBT) thin films were directly deposited on IrO2 electrode using liquid source CVD (LS-CVD) method. Bi deficient region in the SBT films, which existed near the conventional Pt bottom electrode, was successfully eliminated using IrO2 bottom electrode. X-ray diffraction analysis showed our SBT films on IrO2 have good crystalline quality. Satisfactory electric properties (6 μC/cm2 of 2Pr and 10−6 A/cm2 of leakage current) were obtained |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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