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In-situ diagnostic measurements and reactor modeling have been used to study N 2 O dissociation by r.f. discharges. Measurements have been conducted at I Torr (i.e. 133.3 Pa) and at a r.f. power density from 4.8 to 22.7 mW/cm 2 We developed a complete reactor modeling involving an electrical discharge model coupled to a mass transfer model. Only an electrical discharge model accounting for the negative ion conversion from O - to NO - allowed a good coherence between measured and predicted power densities. The electron-N 2 O dissociation rates, obtained from the electrical model, are then used in the mass transfer model, including eight species [N 2 O, N 2 , O 2 , NO, NO 2 , N, O( 3 P) and O('D)]. The corresponding results are in good agreement with the experimental results concerning the N 2 and O 2 productions and the N 2 O consumption. These results have particularly shown that N 2 and O 2 are the most abundant products (> 10 14 molecules/cm 3 ). |
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