Automatic testing of MMIC wafers

Autor: Jon Jorgenson, Gary K. Lewis, Inder J. Bahl
Rok vydání: 1991
Předmět:
Zdroj: International Journal of Microwave and Millimeter-Wave Computer-Aided Engineering. 1:77-89
ISSN: 1522-6301
1050-1827
DOI: 10.1002/mmce.4570010108
Popis: Microwave probes are used extensively for linear and nonlinear characterization of microwave devices on wafer and are commercially available for use at frequencies up to 65 GHz. An on-wafer noise measurement test system, for discrete devices, is now commercially available and on-wafer power measurement techniques are emerging slowly. These probes are also getting more recognition for the testing of packaged chips, packages, and modules. More accurate calibration techniques and their on-wafer validation are being developed. Automatic testing of MMIC wafers, using an integrated test system, is a key requirement for the development of low-cost IC production.
Databáze: OpenAIRE