Characterization of Ion‐Implanted Photoresist Films by Fourier Transform Infrared Spectroscopy
| Autor: | John Alvis, S.W. Sun, Chang‐Ou Lee, Jen‐Jiang Lee |
|---|---|
| Rok vydání: | 1988 |
| Předmět: |
Renewable Energy
Sustainability and the Environment Scanning electron microscope Chemistry Analytical chemistry Infrared spectroscopy Photoresist Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Characterization (materials science) Ion Ion implantation Resist Materials Chemistry Electrochemistry Fourier transform infrared spectroscopy |
| Zdroj: | Journal of The Electrochemical Society. 135:711-714 |
| ISSN: | 1945-7111 0013-4651 |
| DOI: | 10.1149/1.2095728 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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