Synthesis and Polymerizations of N-(tert-Butoxy)maleimide and Application of Its Polymers as a Chemical Amplification Resist

Autor:	Kwang-Duk Ahn, Deok-Il Koo
Rok vydání:	1993
Předmět:	chemistry.chemical_classification chemistry.chemical_compound chemistry Resist Polymer chemistry Organic chemistry Chemical amplification Tert-butoxy Polymer Maleimide
Zdroj:	ACS Symposium Series ISBN: 9780841227217 Polymers for Microelectronics: Resists and Dielectrics
DOI:	10.1021/bk-1994-0537.ch009
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::95b3c780db8cf634798e066ae9812520 https://doi.org/10.1021/bk-1994-0537.ch009 Zobrazit plný text záznamu