| Popis: |
A new microfluidic system for measuring the mass flow rate, dose, chemical concentration, fluid density, specific gravity and temperature has been developed. Vacuum packaged, resonating silicon microtubes are employed to form both a Coriolis mass flow and density sensor. The micro Coriolis mass flow sensor has 10 times the resolution of the best commercially available macro Coriolis mass flow sensors. An onchip temperature sensor (RTD) has been added to the microchip, enabling accurate fluid temperature monitoring. At constant temperature the density resolution/or output stability approaches 1 over 1 million (6 digits) in the new system. Also a new method of chip-level gettering was developed to achieve the milliTorr pressures needed for adequate resonator signal quality for the vacuum packaged microsensors. Applications for both mass flow measurements and density sensing are discussed. |
