Tunable flexible capacitive pressure sensors using arrangement of polydimethylsiloxane micro-pyramids for bio-signal monitoring
| Autor: | P.V.B.S.S Prakash, P Shivanarayanamurthy, Eshwar Thouti, Pramod Kumar, Atmakuru Nagaraju, Prateek Kothari, Deepak Kumar Panwar, Banwari Lal, Achu Chandran |
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| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Materials science Polydimethylsiloxane business.industry Capacitive sensing Metals and Alloys Potential candidate 02 engineering and technology Dielectric thin films 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Pressure sensor Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry 0103 physical sciences Optoelectronics Electrical and Electronic Engineering 0210 nano-technology business Instrumentation Sensitivity (electronics) Signal monitoring |
| Zdroj: | Sensors and Actuators A: Physical. 314:112251 |
| ISSN: | 0924-4247 |
| DOI: | 10.1016/j.sna.2020.112251 |
| Popis: | Recently, microstructured PDMS based pressure sensors are explored as a potential candidate in bio-signal monitoring and electronic-skin applications. Here, we have fabricated capacitive pressure sensors with micro-pyramidal PDMS dielectric thin films, and studied the influence of surface coverage and arrangement of these structures on the sensitivity of pressure sensor devices. Pressure sensor with periodically arranged pyramids (surface coverage: 36.7%) exhibited sensitivity of 0.16 kPa-1 in |
| Databáze: | OpenAIRE |
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