Performance analysis of in-plane piezoelectric unimorph microactuators based on silicon and polymer substrates

Autor:	Alex Díaz-Molina, José Luis Sánchez-Rojas, J. Hernando-García
Rok vydání:	2017
Předmět:	chemistry.chemical_classification History In plane Materials science Silicon chemistry Unimorph chemistry.chemical_element Polymer Composite material Piezoelectricity Computer Science Applications Education
Zdroj:	Journal of Physics: Conference Series. 922:012021
ISSN:	1742-6596 1742-6588
DOI:	10.1088/1742-6596/922/1/012021
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::955ee939815016a658440755c984a40c https://doi.org/10.1088/1742-6596/922/1/012021 Zobrazit plný text záznamu