A12 Development of Grinding Machine for 450mm Wafer : 2^ Report:Numerical Analysis of Static Stiffness and Load Capacity of Water Hydrostatic Table

Autor:	Tomoyuki Koiwai, Ayumu Honda, Takayuki Kitajima, Go Okahata, Hisashi Kobayashi, Akinori Yui, Shigeki Okuyama
Rok vydání:	2012
Předmět:	Load capacity Engineering business.industry Numerical analysis Stiffness Structural engineering law.invention Grinding law medicine Table (database) Development (differential geometry) Wafer medicine.symptom Hydrostatic equilibrium business
Zdroj:	The Proceedings of The Manufacturing & Machine Tool Conference. :33-34
ISSN:	2424-3094
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::955b11e5c0a64bb814bf9bf4b7f5a101 https://doi.org/10.1299/jsmemmt.2012.9.33 Zobrazit plný text záznamu