Infrared spectra of a-Si:H, Cl films
| Autor: | Xu Cun-Yi, Zheng Zhao-Bo, Fang Rong-Chuan, Zhang Wei-Ping, Wu Zhi-Qiang |
|---|---|
| Rok vydání: | 1983 |
| Předmět: |
Amorphous silicon
Bending vibration Hydrogen Absorption spectroscopy Analytical chemistry Infrared spectroscopy chemistry.chemical_element Condensed Matter Physics Electronic Optical and Magnetic Materials Ion selective electrode Mercury (element) chemistry.chemical_compound chemistry Materials Chemistry Ceramics and Composites Chlorine |
| Zdroj: | Journal of Non-Crystalline Solids. :217-220 |
| ISSN: | 0022-3093 |
| DOI: | 10.1016/0022-3093(83)90560-4 |
| Popis: | Films of amorphous silicon (a-Si:H,Cl) containing about 10 atomic % hydrogen and 2–8 at % chlorine have been prepared using the r.f. glow-discharge technique with a mixture of H 2 and SiCl 4 . The infrared spectra showed in addition to the hydrogen induced absorption bands at 2100, 2000, 840, 890 and 860 cm −1 the following new absorption lines: 545 cm −1 due to SiCl stretching, 787 and 737 cm −1 which might be caused by the Si-HCl bending vibrations. The absolute chlorine content was measured using sulphocyanic mercury spectrophotometric and chlorine ion selective electrode methods. |
| Databáze: | OpenAIRE |
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