Hybrid integration of modified uni-traveling carrier photodiodes on a multi-layer silicon nitride platform using total internal reflection mirrors
| Autor: | Weicheng Lai, Yang Shen, Siwei Li, Joe C. Campbell, Tiehui Su, Kuanping Shang, Jizhao Zang, Guangyao Liu, S. J. Ben Yoo, Shaoqi Feng, Xiaojun Xie |
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| Rok vydání: | 2017 |
| Předmět: |
Total internal reflection
Materials science Silicon Hybrid silicon laser business.industry Detector chemistry.chemical_element 02 engineering and technology Substrate (electronics) 021001 nanoscience & nanotechnology 01 natural sciences Photodiode law.invention 010309 optics chemistry.chemical_compound chemistry Silicon nitride law 0103 physical sciences Optoelectronics 0210 nano-technology business Indium gallium arsenide |
| Zdroj: | OFC |
| Popis: | We demonstrate hybrid integration of modified uni-traveling carrier photodiodes on a multi-layer silicon nitride platform using total internal reflection mirrors. Low-loss high-efficiency coupling of InGaAs detector on a silicon substrate has been realized. |
| Databáze: | OpenAIRE |
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