Inkjet printed SU‐8 hemispherical microcapsules and silicon chip embedding

Autor:	Loïc Jacot-Descombes, Victor J. Cadarso, Massimo Mastrangeli, Jürgen Brugger, Maurizio R. Gullo
Rok vydání:	2013
Předmět:	Fabrication Materials science Inkwell Silicon Biomedical Engineering chemistry.chemical_element Bioengineering Nanotechnology Condensed Matter Physics Surface tension Planar chemistry Microsystem Embedding General Materials Science Lithography
Zdroj:	Micro & Nano Letters. 8:633-636
ISSN:	1750-0443
DOI:	10.1049/mnl.2013.0241
Popis:	Planar lithography techniques are not effective for precise fabrication of microdevices with hemispherical shapes. Drop-on-demand (DOD) inkjet printing (IJP) of photo-curable ink is a more appropriate fabrication approach as it takes advantage of the surface tension as well as of the delivery of a well-defined ink volume. Described is a DOD IJP technique onto geometrically-patterned silicon substrates enabling the controlled fabrication of SU-8 hemispherical microcapsules. Open half capsules of 100 µm in diameter with inner cavity volumes of 5, 20 and 45 pl with a printing yield above 96% are demonstrated. The same technique is directly adapted to the fabrication of microcapsules embedding silicon microchips. The reported findings open new paths for controlled encapsulation of liquids into smart microsystems.
Databáze:	OpenAIRE
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