Calculation of Pressure Profiles in a Molecular Flow Regime using LTSpice IV
| Autor: | Kun-Uk Kang, Chongdo Park, Se Hyun Kim, Won-Shik Choi |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Chemistry Materials Science (miscellaneous) Analytical chemistry Conductance 02 engineering and technology General Medicine Mechanics 021001 nanoscience & nanotechnology Condensed Matter Physics 01 natural sciences Finite element method law.invention Free molecular flow law visual_art Electrical network Physics::Space Physics 0103 physical sciences Electronic component visual_art.visual_art_medium Electrical and Electronic Engineering Physical and Theoretical Chemistry 0210 nano-technology |
| Zdroj: | Applied Science and Convergence Technology. 25:67-72 |
| ISSN: | 2288-6559 |
| Popis: | This article describes an electrical network analysis (ENA) method to calculate the pressure distribution of a vacuum system in a molecular flow regime. The vacuum system was modeled using electrical components. For an accurate analysis, a complexly combined pipe model, excluding entrance conductance, was employed and the pressure distribution was simulated using ENA. A vacuum system comprising three vacuum pumps was used for simplicity. In addition, the ENA results were compared with results from finite element analysis (FEA) and experimental measurements. The pressure distribution profiles estimated from ENA, performed using the LTSpice IV software, were in agreement with FEA and experimental results. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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