MEMS Resonant Temperature Sensing with Variable Coupling Stiffness and Improved Sensitivity
| Autor: | Ertug Simsek, Kivanc Azgin |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
Microelectromechanical systems
Coupling Materials science business.industry 0211 other engineering and technologies Stiffness 02 engineering and technology law.invention 020303 mechanical engineering & transports 0203 mechanical engineering Buckling law 021105 building & construction medicine Optoelectronics Sensitivity (control systems) Proof mass Tuning fork medicine.symptom business Voltage |
| Zdroj: | 2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF). |
| DOI: | 10.1109/ifcs-isaf41089.2020.9234946 |
| Popis: | This paper reports the sensitivity improvement of a double-ended tuning fork resonant thermal strain sensor operating close to buckling limit with electrostatic softening and electrostatic coupling. A decrease in the coupling stiffness pulls the resonance frequency of out-of-phase mode close to buckling, enhancing the sensitivity of the sensor. The sensitivities of the sensor for 0V proof mass voltage difference is 28.022 Hz/K while 100V proof mass voltage difference results in 33.945 Hz/K, with a 21% improvement. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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