A study of the effect of synchrotron radiation exposure on the thermophysical parameters of the PMMA X-ray resist

Autor:	B. G. Goldenberg, E. V. Petrova, A. S. Kozlov, V. F. Pindyurin, A. N. Gentselev
Rok vydání:	2012
Předmět:	Thermogravimetric analysis Materials science technology industry and agriculture X-ray Analytical chemistry Synchrotron radiation macromolecular substances Radiation equipment and supplies Surfaces Coatings and Films body regions Differential scanning calorimetry Resist Irradiation Thin film
Zdroj:	Journal of Surface Investigation. X-ray, Synchrotron and Neutron Techniques. 6:12-18
ISSN:	1819-7094 1027-4510
Popis:	Differential scanning calorimetry and thermogravimetric analysis results for polymethyl methacrylate (PMMA, monomer with the atomic formula C5H8O2) samples, extensively used as an X-ray resist, are presented. The size distribution of aerosol particles formed by PMMA sample ablation under terrahertz radiation is obtained. The size dependence of the coil-like macromolecules of irradiated PMMA on the exposure dose is found experimentally, and a descriptive model is proposed that is well consistent with the characteristic curve. The processes occurring during irradiation of PMMA are explained (at the qualitative level), and recommendations on intensive SR irradiation of PMMA are given.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::944b7998b50904eea079d7276366ee04 https://doi.org/10.1134/s1027451012010089 Zobrazit plný text záznamu Full text from SpringerLink