Simulation and fabrication of large area uncooled microbolometers for terahertz wave detection

Autor:	Mathieu Tremblay, Alain Bergeron, Martin Bolduc, Christine Alain, Samir Ilias, Hubert Jerominek, Linda Marchese, Patrice Topart, Hassane Oulachgar, Francis Provençal
Rok vydání:	2011
Předmět:	Fabrication Materials science Wave detection business.industry Terahertz radiation Bolometer Detector Microbolometer law.invention Long wavelength Optics law Optoelectronics business Microfabrication
Zdroj:	2011 International Conference on Infrared, Millimeter, and Terahertz Waves.
DOI:	10.1109/irmmw-thz.2011.6104932
Popis:	Large area microbolometer detectors are very attractive for applications where high sensitivity is required. This is particularly important for long wavelength spectroscopy in the far-infrared and sub-millimeter region. This paper presents current progress in the development of large area uncooled microbolometer FPAs at INO.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9427433d731d7985e59b8a20b7cf7eae https://doi.org/10.1109/irmmw-thz.2011.6104932 Zobrazit plný text záznamu