Modelling and Charactrization of the MEMS based filters for the spectroscopic imaging applications
| Autor: | Gino Putrino, Brett Nener, Mariusz Martyniuk, K. K. M. B. Dilusha Silva, Dhirendra Kumar Tripathi, Lorenzo Faraone, Hemendra Kala |
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| Rok vydání: | 2018 |
| Předmět: |
010302 applied physics
Microelectromechanical systems Materials science Silicon Physics::Instrumentation and Detectors business.industry Physics::Optics chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Computer Science::Other Full width at half maximum chemistry 0103 physical sciences Transmittance Optoelectronics 0210 nano-technology business Silicon oxide Refractive index Fabry–Pérot interferometer Free spectral range |
| Zdroj: | 2018 Conference on Optoelectronic and Microelectronic Materials and Devices (COMMAD). |
| Popis: | In this work we present the theoretical optical modelling of full width at half maximum and free spectral range of the microelectromechanical systems (MEMS) based based Fabry Perot filters. These filters use silicon and silicon oxide based distributed Bragg reflectors. We also show the impact of variation of silicon thin film properties and structural deformation on the performance of filters. Finally we present fabrication and optical characterization of the fixed cavity SWIR wavelength range FP filters. The fabricated filters showed 39 nm FWHM and above 80% transmittance. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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