| Popis: |
Thermally induced Al hillocks cause manufacturing and reliability problems in integrated devices. These thermal hillocks, which form during the sinter process, interfere with the uniformity of subsequent spin-on materials (e.g. photoresist) and can create pinholes susceptible to corrosion or electrical breakdown. Thermal hillocks have both lateral and vertical dimensions on the order of 1 mu m. The authors find that thermal hillocks are present on lines having linewidths greater than 3 mu m, absent on lines having linewidths between 0.8 mu m and 3 mu m, and, again, present on lines having linewidths of 0.6 mu m. These last hillocks are defined as line hillocks to distinguish them from hillocks occurring in the wider areas. > |
