New Deposition Method at Low Temperature Using Active Species Derived from High Purity Ozone Gas and Ethylene Gas

Autor:	Miura Toshinori, Kameda Naoto, Yoshiki Morikawa, Hidehiko Nonaka, Mitsuru Kekura, Ken Nakamura
Rok vydání:	2019
Předmět:	chemistry.chemical_compound Materials science Ethylene Ozone Chemical engineering chemistry Deposition (chemistry)
Zdroj:	Vacuum and Surface Science. 62:433-438
ISSN:	2433-5843 2433-5835
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::93a01f674dcd582f55eb3b67e55bf855 https://doi.org/10.1380/vss.62.433 Zobrazit plný text záznamu