| Popis: |
This paper investigates the quantifiable effects of the gas flow mixture on the structural quality of CVD diamond films. The experimental study includes two types of gas flow mixtures: (a) CH/sub 4//H/sub 2/ and (b) CO/H/sub 2/. All films are grown in 5" quartz dome, 3" substrate reactor. The reactor output variables, which include film morphology expressed by the growth parameter /spl alpha/ and grain size, structural quality as measured by Raman spectra and scanning electron microscopy (SEM) techniques, linear growth rate, and carbon conversion efficiency, are examined and a complete analysis is presented in this paper. |
