Glow Characterization in Low-Pressure Radio-Frequency $\hbox{CH}_{2} \hbox{F}_{2}$ and $\hbox{C}_{2}\hbox{H}_{2}\hbox{F}_{4}$ Plasma Deposition Systems
| Autor: | C-I Lin, Chien-Hsuan Pan, Chun Huang, Ching-Yuan Tsai |
|---|---|
| Rok vydání: | 2011 |
| Předmět: |
chemistry.chemical_classification
Nuclear and High Energy Physics Materials science Analytical chemistry Infrared spectroscopy Condensed Matter Physics Characterization (materials science) chemistry.chemical_compound Monomer Nuclear magnetic resonance Hydrocarbon chemistry Plasma diagnostics Fluorocarbon Radio frequency Luminescence |
| Zdroj: | IEEE Transactions on Plasma Science. 39:2506-2507 |
| ISSN: | 1939-9375 0093-3813 |
| DOI: | 10.1109/tps.2011.2157528 |
| Popis: | The glow characteristics and deposited film structures of fluorocarbon monomers in radio-frequency glow discharges are investigated using CH2F2 and C2H2F4, which were compared to hydrocarbon monomer such as CH4. The glow was characterized and investigated by optical photography, optical emission spectroscopy, and Fourier transform infrared spectrometry. The glow differences were attributed to the nature of the luminous gas phase in respect to polymer-forming species. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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