Reduction of process-induced Waviness in Laser Polishing of Fused Silica by a Thermography-base Process Control

Autor: Manuel Jung, Sai M. D. Kukkala, Edgar Willenborg
Rok vydání: 2022
Zdroj: Optica Advanced Photonics Congress 2022.
DOI: 10.1364/lac.2022.lm2b.1
Popis: A thermography-based approach for process control in laser polishing of fused silica is presented and compared with state-of-the-art pyrometer-based approaches. Furthermore, influences of laser power fluctuation on the formation of waviness are investigated.
Databáze: OpenAIRE