Mechanical characterization of bulk-micromachined Ti membranes by microbending and by vibrometry

Autor:	Bertrand Boutaud, G. Becan, Alain Bosseboeuf, H. Philippe, Marion Woytasik, P. Coste, Elie Lefeuvre, J. Phung
Rok vydání:	2021
Předmět:	Microelectromechanical systems Microprobe Membrane Materials science chemistry chemistry.chemical_element Wafer Microscopic Interferometry Composite material Pressure sensor Titanium Characterization (materials science)
Zdroj:	2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP).
DOI:	10.1109/dtip54218.2021.9568677
Popis:	This paper presents the mechanical characterization of membranes micromachined in bulk-titanium wafers, which can be future parts of various Ti-based MEMS such as pressure sensors or microvalves for corrosive environment. One membrane was characterized by microbending using a mechanical microprobe. Two membranes were characterized by vibrometry using microscopic interferometry, and the residual mechanical stress could be derived from these measurements. These are key experiments for successful design of future Ti-based MEMS.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::933f09080991a89010a3651c3547632d https://doi.org/10.1109/dtip54218.2021.9568677 Zobrazit plný text záznamu