324*487 Schottky-barrier infrared imager
| Autor: | Y. Moriyama, Shigeru Tohyama, N. Takada, Kazuo Konuma, S. Yamagata, K. Masubuchi, T. Tanaka, N. Yoshioka, E. Oda, Nobukazu Teranishi |
|---|---|
| Rok vydání: | 1990 |
| Předmět: |
Materials science
Infrared business.industry Schottky barrier Electronic packaging Schottky diode Noise-equivalent temperature Electronic Optical and Magnetic Materials Optics visual_art visual_art.visual_art_medium Optoelectronics Quantum efficiency Ceramic Electrical and Electronic Engineering business Diode |
| Zdroj: | IEEE Transactions on Electron Devices. 37:629-635 |
| ISSN: | 0018-9383 |
| DOI: | 10.1109/16.47766 |
| Popis: | A standard TV-compatible PtSi Schottky-barrier infrared imager is described. The imager is a 324*487 element area array and has an electronic shutter function. Although the pixel is 42*21 mu m, a large fill factor of 42% is obtained, using a 1.5- mu m minimum design rule and a two-level polysilicon layer, and two-level aluminum layer structure. Using face-down bonding technology, it was possible to reduce the package size to 60% of the conventional ceramic package size. Due to optimization of the Schottky-barrier diode process and the diode structure, the noise equivalent temperature difference is as small as 0.1 K at f/1. > |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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