| Autor: |
Chae Young Lee, Jang Byung Kyu, Won-Jae Lee, Kap Ryeol Ku, Ko Sang Ki, Jung Doo Seo, Jung Gyu Kim, Jung-Woo Choi, Myung Ok Kyun |
| Rok vydání: |
2019 |
| Předmět: |
|
| Zdroj: |
Materials Science Forum. 963:38-41 |
| ISSN: |
1662-9752 |
| DOI: |
10.4028/www.scientific.net/msf.963.38 |
| Popis: |
4H-SiC single crystal was successfully grown with source powder modified by the pretreatment process in order to improve polytype stability of SiC crystal. To increase C/Si ratio in SiC source powder, SiC source powder was mixed with liquid carbon source and then pre-heated at 1200°C. SiC single crystal grown with modified source powder exhibited complete 4H polytype and the crystal quality of SiC crystal grown by modified source power was definitely better than conventional source powder |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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