Six-degree-of-freedom geometrical errors measurement system with compensation of laser beam drifts and installation errors for linear stage

Autor:	Chi-Chen Lo, Wen-Huai Hsu, Chien-Sheng Liu
Rok vydání:	2023
Předmět:	Mechanical Engineering Electrical and Electronic Engineering Atomic and Molecular Physics and Optics Electronic Optical and Magnetic Materials
Zdroj:	Optics and Lasers in Engineering. 162:107407
ISSN:	0143-8166
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::92785af491400c936afb5bc2116ce025 https://doi.org/10.1016/j.optlaseng.2022.107407 Zobrazit plný text záznamu Full Text from ScienceDirect