Deconvolution of neutron depth profiling spectra

Autor: Dietrich H. Vincent, John T. Maki, Ronald F. Fleming
Rok vydání: 1986
Předmět:
Zdroj: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 17:147-155
ISSN: 0168-583X
DOI: 10.1016/0168-583x(86)90077-7
Popis: Iterative methods for determining deconvolued depth profiles from measured neutron depth profiling (NDP) energy spectra are presented. The methods account for energy broadening caused by system noise, energy straggling, multiple small angle scattering, and geometrical acceptance angles. Examples of the methods are given for known and unknown profiles of helium-3 and nitrogen-14.
Databáze: OpenAIRE