Film thickness distributions on arc discharge type high vacuum ion plating (I)

Autor:	Masami Nakasone, Yasushi Kawashimo, Eiji Komatsu
Rok vydání:	1986
Předmět:	Electric arc Materials science Ultra-high vacuum Ion plating Electrical and Electronic Engineering Composite material Condensed Matter Physics Surfaces Coatings and Films
Zdroj:	SHINKU. 29:341-344
ISSN:	1880-9413 0559-8516
DOI:	10.3131/jvsj.29.341
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::9269bcfec4c26738bfd0a7bc61d50645 https://doi.org/10.3131/jvsj.29.341 Zobrazit plný text záznamu