Hydrogen-Robust Submicron IrOx/PZT/Ir Capacitors for Embedded Ferroelectric Memory

Autor:	Rahim Kavari, Luigi Colombo, S. Ma, Stephen R. Gilbert, J. Amano, S. R. Summerfelt, L. A. Wills, Alvin Leng Sun Loke, Tomoyuki Sakoda, G. Xing, Theodore S. Moise
Rok vydání:	2000
Předmět:	Capacitor Materials science Hydrogen chemistry law chemistry.chemical_element Nanotechnology Ferroelectricity law.invention
Zdroj:	Extended Abstracts of the 2000 International Conference on Solid State Devices and Materials.
DOI:	10.7567/ssdm.2000.c-3-2
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::92696a22d437b0fc45a0399b6d2a2282 https://doi.org/10.7567/ssdm.2000.c-3-2 Zobrazit plný text záznamu